发明名称 |
METHOD OF MANUFACTURING A BIOCOMPATIBLE ELECTRODE |
摘要 |
<p>A biocompatible electrode is manufactured by depositing filling metal 36 and etching back the filling metal to the surface of the surrounding insulator 30. Then, a further etch forms a recess 38 at the top of the via 32. An electrode metal 40 is then deposited and etched back to fill the recess 38 and form biocompatible electrode 42. In this way, a planar biocompatible electrode is achieved. The step of etching to form the recess may be carried out in the same CMP tool as is used to etch back the filling metal 36. A hydrogen peroxide etch may be used.</p> |
申请公布号 |
EP2345069(A1) |
申请公布日期 |
2011.07.20 |
申请号 |
EP20090756821 |
申请日期 |
2009.10.26 |
申请人 |
NXP B.V. |
发明人 |
DAAMEN, ROEL;MERZ, MATTHIAS |
分类号 |
H01L21/768;G01N27/403;H01L21/3213 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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