| 摘要 |
The present invention relates to a method and to a device for determining a deformation of a disk-shaped workpiece, particularly a mold wafer. The device comprises a rotatable, height and laterally adjustable mounting unit (5, 5a, 15a-c; 5, 5a, 15d) for mounting an inner region (IB) of the disk-shaped workpiece (3); a determination unit (25) for determining eccentricity (d) of a center axis (M') of the disk-shaped workpiece (3) from a center axis (M) of the mounting unit (5, 5a, 15a-c; 5, 5a, 15d) and for generating a suitable adjustment signal for the mounting unit (5, 5a, 15a-c; 5, 5a, 15d); a deposit unit (3a, 3b, 3c) for depositing the disk-shaped workpiece (3) during a lateral adjustment process of the mounting unit (5, 5a, 15a-c; 5, 5a, 15d), and a fixed-height detector unit (50) for measuring the deviation (WR) of a plurality of measuring points (P1-P8), respectively, in a non-mounted outer region (AB) of the disk-shaped workpiece (3) from a predetermined height position (ZO) corresponding to the deformation using a height position (ZO) of the mounting unit (5, 5a, 15a-c; 5, 5a, 15d) predetermined by rotating the mounting unit (5, 5a, 15a-c; 5, 5a, 15d) or the detector unit (50). |
