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发明名称
VORRICHTUNG UND VERFAHREN ZUR ZERSTÄUBUNG MIT EINEM BEWEGBAREN PLANAREN TARGET
摘要
申请公布号
AT498198(T)
申请公布日期
2011.02.15
申请号
AT20050754707T
申请日期
2005.06.01
申请人
LEYBOLD OPTICS GMBH
发明人
WILLKOMMEN, UDO;HAUSWALD, RALF;FUKAREK, WOLFGANG
分类号
H01J37/34
主分类号
H01J37/34
代理机构
代理人
主权项
地址
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