| 摘要 |
A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, according to the invention, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved. |
