发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device which discharges a cutting liquid to be scattered by a cutting blade forcedly by a suction means and suppresses deterioration with time by preventing external force from being applied on a tubular member for guiding the cutting liquid into the suction means.SOLUTION: In this cutting device, a suction source 86 is driven to guide the cutting liquid splashed up by the cutting blade 65 into a guidance hose 83 connected with a movable cover 73 of a blade cover 70 through a first tubular connection member 81, guide it into a suction chamber 85, and discharge it. A second tubular connection member 82 for connecting the guidance hose 83 with the suction chamber 85 can rotate freely around a vertical axis by a rotary mechanism 850 and can rotate following the movement of the guidance hose 83 revolving when indexing and feeding to prevent external force from being applied on the first tubular connection member 81 and the guidance hose 83.
申请公布号 JP2011016170(A) 申请公布日期 2011.01.27
申请号 JP20090160555 申请日期 2009.07.07
申请人 DISCO ABRASIVE SYST LTD 发明人 OKUNARI KENGO
分类号 B23Q11/00;B23Q11/10;H01L21/301 主分类号 B23Q11/00
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