发明名称 THIN FILM TRANSISTOR, METHOD OF FABRICATING THE SAME, AND A DISPLAY DEVICE INCLUDING THE THIN FILM TRANSISTOR
摘要 A thin film transistor (TFT), a method of fabricating the same, and a display device including the TFT, are provided. The method includes forming an edge region that is doped with impurities of a conductivity type opposite to a conductivity type of impurities doped into source and drain regions. The edge region is in contact with a channel region and an edge portion of the source region. The method also includes forming contact holes for source and drain electrodes to expose a portion of the drain region and expose respective portions of the source region and the edge region contacting the edge portion of the source region; and forming source and drain electrodes. Thus, a source-body contact is automatically formed so that an edge effect can be reduced and a kink effect can be reduced or removed.
申请公布号 US2010255644(A1) 申请公布日期 2010.10.07
申请号 US20100820860 申请日期 2010.06.22
申请人 PARK BYOUNG-KEON 发明人 PARK BYOUNG-KEON
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
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