| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for producing a silicon sheet using a sheet forming method, by which a silicon sheet is efficiently produced while reducing influences from a liquid surface on the silicon sheet during forming when a base plate is extricated from a silicon melt. <P>SOLUTION: An apparatus for producing a silicon sheet 2 is provided, in which a base plate 1 is immersed in a silicon melt 4, then the base plate 1 is extricated from the silicon melt 4, and the silicon sheet 2 is formed on the base plate 1 by solidifying the silicon melt 4. The apparatus includes a control means for controlling the velocity of the base plate 1 in such a manner that the moving velocity of the base plate 1 when extrication of the silicon sheet 2 formed on the surface of the base plate 1 from the silicon melt 4 is finished is higher than the moving velocity of the base plate 1 when immersion of the base plate 1 in the silicon melt 4 is started. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
