| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of using empirical profile fits (EPF) to quantitate surface-binding optical resonance profiles. SOLUTION: The EPF process has two stages, calibration and fit. In the calibration stage, a calibration surface-binding optical resonance scan is obtained over a range sufficient to include full resonance profiles for all regions. The empirical profiles for each region of interest are generated by a main calibration module, together with first derivative curves and diagnostic information. Properties returned may include approximate resonance position, depth, and width. In the fit stage, individual ROI (Region of Interest) scans are used for measurement of resonance shifts relative to the empirical profile. The fitting module identifies the region of the experimental scan encompassing the resonance and fits that region using the previously stored empirical profiles, quantifying, and returning the desired values including the shift in the resonance as compared to its location at calibration, estimated absolute angles or wavelengths, time of resonance minimum, and additional diagnostic and quality information. COPYRIGHT: (C)2010,JPO&INPIT
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