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发明名称
Verfahren und Vorrichtung zur Herstellung eines Halbleiterbauelements
摘要
申请公布号
DE60044762(D1)
申请公布日期
2010.09.16
申请号
DE20006044762
申请日期
2000.03.16
申请人
KANEKA CORP.
发明人
KONDO, MASATAKA;HAYASHI, KATSUHIKO;KURIBE, EIJI
分类号
H01L31/18;H01L21/00
主分类号
H01L31/18
代理机构
代理人
主权项
地址
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