摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell, increasing an open voltage, a short-circuiting current, and a fill factor F.F. owing to an increase in carrier density, and hence increasing the conversion efficiency. <P>SOLUTION: The method of manufacturing a solar cell includes: a sputtering process for sputtering a target including a group Ib element and a target including a group IIIb element in an atmosphere including Se, and forming a layer including the group Ib element, group IIIb element, and Se on a substrate; and a heat-treatment process for heating the layer. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |