发明名称 |
APPARATUS FOR TRANSFERRING A CASSETTE |
摘要 |
<p>PURPOSE: An apparatus for transferring a cassette is provided to minimize a particle generated in a friction region and a driving unit by making the driving unit and the friction region airtight. CONSTITUTION: A guide rail(20) is mounted in an upper part of a base frame(10). The guide rail forms an opening along longitudinal direction. The space region is formed inside the guide rail. A cover seals the space region to be airtight. A cassette carrier(30) comprises a guide hole through which the cover passes. The driving unit(40) moves the cassette carrier in straight direction.</p> |
申请公布号 |
KR100965559(B1) |
申请公布日期 |
2010.06.23 |
申请号 |
KR20090066563 |
申请日期 |
2009.07.21 |
申请人 |
SM-TECH CO., LTD.;HWANG, DOO MO;SON, HYUN TAEK |
发明人 |
HWANG, DOO MO;SON, HYUN TAEK |
分类号 |
H01L21/677;B61B13/00;B65G35/06;B65G49/07 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|