发明名称 APPARATUS FOR TRANSFERRING A CASSETTE
摘要 <p>PURPOSE: An apparatus for transferring a cassette is provided to minimize a particle generated in a friction region and a driving unit by making the driving unit and the friction region airtight. CONSTITUTION: A guide rail(20) is mounted in an upper part of a base frame(10). The guide rail forms an opening along longitudinal direction. The space region is formed inside the guide rail. A cover seals the space region to be airtight. A cassette carrier(30) comprises a guide hole through which the cover passes. The driving unit(40) moves the cassette carrier in straight direction.</p>
申请公布号 KR100965559(B1) 申请公布日期 2010.06.23
申请号 KR20090066563 申请日期 2009.07.21
申请人 SM-TECH CO., LTD.;HWANG, DOO MO;SON, HYUN TAEK 发明人 HWANG, DOO MO;SON, HYUN TAEK
分类号 H01L21/677;B61B13/00;B65G35/06;B65G49/07 主分类号 H01L21/677
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