SUBSTRATE TRANSFERRING DEVICE, SUBSTRATE MANUFACTURING SYSTEM HAVING THE SAME AND METHOD OF TRANSFERRING SUBSTRATE

摘要

PURPOSE: A substrate transferring device, a substrate processing system, and a substrate transferring method are provided to prevent mapping defect caused by misalignment by aligning a semiconductor substrate before loading a semiconductor substrate accepted in an accepting case. CONSTITUTION: A receiving portion(110) is included in the front of a frame. An index(120) draws a semiconductor substrate from the receiving portion and transfers the semiconductor. A work processing part(130) processes the semiconductor substrate offered from the index. The receiving portion comprises a plurality of receiving boxes(111). An opener(122) opens and closes the door of the receiving box.