| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a ceramic substrate which suppresses the production of dust separating from a defect such as voids of an insulating layer, and the like. <P>SOLUTION: The ceramic substrate 10 is formed by adhering a ceramic green sheet (first insulating layer 11) having a filler and a glass component made of ceramics to a porous ceramic layer (second insulating layer 12) formed by coupling the ceramic fillers to each other for sintering. The glass component spreads in the porous ceramic layer, thereby suppressing the production of voids. A plurality of filler coupling parts exist at an end rather than a central part in a thickness direction of the ceramic substrate 10. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
