| 摘要 |
PROBLEM TO BE SOLVED: To take thermal deformation of a discharge tube connection holder for connecting a plurality of discharge tubes each other, and an acceleration applied onto the discharge tube connection holder in accompaniment to movement of a gas laser resonator, into consideration, in the laser resonator. SOLUTION: The laser resonator 10 includes three discharge tube lines 3A, 3B, 3C having respectively the two-discharge tubes 1a, 2a, 1b, 2b, 1c, 2c aligned in an axial direction, the discharge tube connection holder 5 for connecting each other and supporting the discharge tubes in the respective discharge tube lines, an end plate 15 provided with an output mirror 11 arranged in one end of the discharge tube 1c, an end plate 16 provided with a rear mirror 12 arranged in one end of the discharge tube 2a, and four support rods 21-24 with both ends respectively fixed onto the end plates 15, 16. The discharge tube connection holder 5 is fixed to the lower support rods 21, 22 via a clamp (rigid member) 25, and is connected to the upper support rods 23, 24 via a clamp (elastic member) 26, 27. COPYRIGHT: (C)2010,JPO&INPIT |
