| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic member with which it is possible to easily perform verification of the positional deviation of a conductive member buried in the ceramic member, measurement of film thickness of the ceramic member, and measurement of the temperature of a substrate mounted on the ceramic member. SOLUTION: The ceramic member includes a ceramic sintered compact 13 having a coefficient of thermal expansion equal to that of yttria, a conductive member 15 containing a high melting point metal, and a light-transmitting yttria sintered compact 12 arranged on the conductive member 15. In the ceramic member, the ceramic sintered compact 13 and the yttria sintered compact 12 are integrally sintered while holding the conductive member 15 between them. COPYRIGHT: (C)2010,JPO&INPIT |
