发明名称 CLEANING COMPOSITIONS FOR MICROELECTRONIC SUBSTRATES
摘要 Cleaning compositions suitable for cleaning microelectronic structures having silicon dioxide, low-k or high-k di-electrics and copper or aluminum metallizations contain a polar organic solvent selected from amides, sulfones, sulfolenes, selenones and saturated alcohols and a strong alkaline base.
申请公布号 IL165581(A) 申请公布日期 2009.06.15
申请号 IL20040165581 申请日期 2004.12.06
申请人 MALLINCKRODT BAKER, INC. 发明人
分类号 C11D1/00;C11D7/50;C23G1/00;C23G1/06;G03F7/42;H01L21/027;H01L21/304;H05K3/26 主分类号 C11D1/00
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