WIRE GRID POLARIZER AND METHOD FOR MANUFACTURING THE SAME

摘要

Disclosed is a wire grid polarizer that exhibits a high degree of polarization, p-polarization transmission, and s-polarization reflectance for light entering from the surface side, and low s-polarization reflectance for light entering from the back side. Also disclosed is a method for manufacturing the wire grid polarizer. The wire grid polarizer (10) has ridges (12) on the surface of a light-transmitting substrate (14) formed with a pitch Pp, and three surfaces of each ridge (12)-the upper surface (16), a first side surface (18), and a second side surface (20)- are covered by thin metallic wires, wherein: (a) the thickness Dm1 of the thin metallic wire covering the first side surface (18) and the thickness Dm2 of the thin metallic wire covering the second side surface (20) are 20nm or below; (b) the thickness Hm of the thin metallic wire (22) covering the upper surface (16) and the height Hp of the ridges (12) satisfy the relation 40nm=Hm=0.5xHp; and (c) Dm1, Dm2, Pp and the width Dp of the ridges (12) satisfy the relation Dm1+Dm2=0.4x(Pp-Dp).