| 摘要 |
PROBLEM TO BE SOLVED: To provide at low cost an optoelectronic integrated circuit superior in high frequency characteristics. SOLUTION: The optoelectronic integrated circuit 600, having a sapphire substrate 611 of an SOS substrate 610 as a lower clad, is monolithically formed of an optical waveguide having a silicon film 611 as a core, an electronic integrated circuit 640 formed on the silicon film 611, and grooves 621, 622 for fixing optical fibers 670, 680, and is mounted in a hybrid with a photodiode array 650 and a laser diode array 660. Since the lower clad of the optical waveguide is made of the sapphire substrate, with the core made of the silicon film, a refractive index difference can be made sufficiently large, making the silicon film thinner and reducing core machining time or the like. Further, the electronic integrated circuit 640 is formed on the sapphire substrate 611, which improves high frequency characteristics. COPYRIGHT: (C)2009,JPO&INPIT |
