发明名称 REDUCING SHORT CHANNEL EFFECTS IN TRANSISTORS
摘要 Microelectronic structures and associated methods for reducing short channel effects in transistors are generally described. In one example, an apparatus includes a semiconductor channel, one or more transistor gates coupled with the semiconductor channel, a spacer film coupled to the one or more transistor gates, and a semiconductor material epitaxially grown (epi-growth) on the semiconductor channel wherein the epi-growth is coupled to the to the spacer film to reduce short channel effects of the one or more transistor gates by effectively increasing the transistor gate length.
申请公布号 US2009108313(A1) 申请公布日期 2009.04.30
申请号 US20070877992 申请日期 2007.10.24
申请人 DOYLE BRIAN S;RAKSHIT TITASH 发明人 DOYLE BRIAN S.;RAKSHIT TITASH
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
代理机构 代理人
主权项
地址