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发明名称
VERFAHREN ZUM HERSTELLEN EINER HALBLEITERVORRICHTUNG
摘要
申请公布号
DE602004018745(D1)
申请公布日期
2009.02.12
申请号
DE200460018745T
申请日期
2004.01.22
申请人
PANASONIC CORPORATION
发明人
ARITA, KIYOSHI
分类号
H01L21/3065;H01L21/784;B23K9/00;B23K10/00;H01L21/301;H01L21/46;H01L21/68;H01L21/78
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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