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发明名称
ANORDNUNG ZUM EINDIFFUNDIEREN VON DOTIERSTOFFEN
摘要
申请公布号
DE2133876(A1)
申请公布日期
1973.01.18
申请号
DE19712133876
申请日期
1971.07.07
申请人
SIEMENS AG, 1000 BERLIN U. 8000 MUENCHEN
发明人
BACHMANN, GERHARD, 8000 MUENCHEN
分类号
H01L21/00;(IPC1-7):01J17/34
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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