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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS53147463(A)
申请公布日期
1978.12.22
申请号
JP19770062335
申请日期
1977.05.27
申请人
MITSUBISHI ELECTRIC CORP
发明人
KUSANO YUUJI
分类号
H01L21/306;H01L21/28;H01L21/31
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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