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发明名称
Verfahren zur Herstellung von Mikrokanälen in einer integretierten Struktur
摘要
申请公布号
DE60228856(D1)
申请公布日期
2008.10.23
申请号
DE20026028856
申请日期
2002.12.04
申请人
STMICROELECTRONICS S.R.L., AGRATE BRIANZA
发明人
D'ARRIGO, GIUSEPPE ALESSIO MARIA;SPINELLA, ROSARIO CORRADO;ARENA, GIUSEPPE;LORENTI, SIMONA
分类号
H01L21/764;B81C1/00;G01N27/447;H01L21/306;H01L21/3065;H01L21/762
主分类号
H01L21/764
代理机构
代理人
主权项
地址
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