| 摘要 |
A coating apparatus includes support for supporting a mother substrate including unit substrates, a coater for coating the unit substrate with photosensitive materials, a detector for detecting foreign matters, a remover for removing the foreign matters from the unit substrate, and a controller for controlling the coater, detector, and remover. The coater includes a body containing the photosensitive materials, and inlet and outlet portions for inputting and outputting the photosensitive materials to/from the body. A width of the outlet portion is the same as that of the unit substrate. The detector is positioned at front of the coater to detect the foreign matters before the coating process. The remover removes the foreign matters. The coater discharges the photosensitive material only onto the unit substrate. Discharging of the photosensitive material is interrupted when the foreign matters are found. The coating apparatus requires less photosensitive material, and can be more efficient
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