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发明名称
EINRICHTUNG ZUM REAKTIVEN SPUTTERN
摘要
申请公布号
AT397678(T)
申请公布日期
2008.06.15
申请号
AT20040017807T
申请日期
2004.07.28
申请人
APPLIED MATERIALS GMBH & CO. KG
发明人
FRITZ, THOMAS;KEMMERER, GUENTER
分类号
C23C14/00;C23C14/34;C23C14/54;C23C14/56
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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