| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an integrated demultiplexer which is extremely small, whose height can be reduced and which has excellent characteristics, and to provide a small and high performance high frequency demultiplexer. <P>SOLUTION: In the integrated demultiplexer, a thin film piezoelectric filter comprised of a thin film piezoelectric resonator and an integration filter are formed on a substrate on which an insulation layer are formed on the upper surface of a semiconductor substrate, the thin film piezoelectric resonator is constituted of a piezoelectric resonant stack having a piezoelectric layer, an upper electrode and a lower electrode formed so as to face the piezoelectric layer between them, a gap or acoustic reflection layer formed under the piezoelectric resonant stack and the substrate which supports the piezoelectric resonant stack, wherein the integration filter is formed on the insulation layer and constituted of electric elements of an inductor and a capacitor. <P>COPYRIGHT: (C)2008,JPO&INPIT |
