| 摘要 |
PROBLEM TO BE SOLVED: To miniaturize an optical reflection element having a piezoelectric oscillation plate. SOLUTION: The optical reflection element has: a frame body 17 supported by a frame body 14 by means of a serpentine support part 16A provided in a groove 15; and an optical reflection part 20 supported on the frame body 17 by means of a serpentine support part 19A provided in a groove 18, wherein the serpentine support part 16A has a rectangular piezoelectric oscillation plate 21A and a rectangular piezoelectric oscillation plate 22A, the serpentine supporting part 19A has a rectangular piezoelectric oscillation plate 26A and a rectangular piezoelectric oscillation plate 27A, the oscillation phase at the rectangular piezoelectric oscillation plate 21A and the oscillation phase at the rectangular piezoelectric oscillation plate 22A is shifted by 180 degrees, and the oscillation phase at the rectangular piezoelectric oscillation plate 26A and the oscillation phase at the rectangular piezoelectric oscillation plate 27A is shifted by 180 degrees. COPYRIGHT: (C)2009,JPO&INPIT
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