OPTICAL GAIN APPROACH FOR ENHANCEMENT OF OVERLAY AND ALIGNMENT SYSTEMS PERFORMANCE
摘要
<p>A resultant image of a grating target may be obtained by dividing an image of the target into first and second portions and optically modifying the first and/or second portion such that a final image formed from their combination is characterized by a Moiré pattern. The resultant image may be analyzed to determine a shift in the grating target from a shift in the Moiré pattern. Optical alignment apparatus may include a first beam splitter, an image transformation element optically coupled to the first beam splitter, and a second beam splitter. The first beam splitter divides an image of a grating target into first and second portions. The second beam splitter combines the first portion and the second portion. The image transformation element optically modifies the first and/or second portion such that a final image formed from their combination is characterized by a Moiré pattern.</p>
申请公布号
WO2008134378(A1)
申请公布日期
2008.11.06
申请号
WO2008US61318
申请日期
2008.04.23
申请人
KLA-TENCOR CORPORATION;KANDEL, DANIEL;LEVINSKI, VLADIMIR;ADEL, MICHAEL;SELIGSON, JOEL
发明人
KANDEL, DANIEL;LEVINSKI, VLADIMIR;ADEL, MICHAEL;SELIGSON, JOEL