| 摘要 |
Provided is an XY table actuator that, while building-in a drive means for freely moving an object placed on a table within an XY-plane and positioning the object, can be significantly reduced in size and that helps to suppress an increase in table height. The actuator has: a stationary plate (2) having a receiving groove extending in an X-direction; a moving plate (5) having a receiving groove extending in a Y-direction; an intermediate plate (4) whose lower body is assembled to the receiving groove (20) of the stationary plate (2) through intermediation of rolling bodies (3), whose upper body is assembled to the receiving groove of the moving plate (5) through intermediation of rolling bodies (3), and which is movable in the X-direction with respect to the stationary plate, with the moving plate being movable in the Y-direction with respect to the intermediate plate; an X-drive means (6) for propelling the intermediate plate in the X-direction with respect to the stationary plate; and a Y-drive means (7) for propelling the moving plate in the Y-direction with respect to the intermediate plate, in which the intermediate plate is provided with receiving chambers (40, 41) for the X-drive means and the Y-drive means, respectively. |
