| 摘要 |
A ceramic heater including an electrostatic chuck is provided to improve a manufacturing yield by adjusting constantly a thickness of a dielectric layer for covering an electrostatic chuck electrode. A ceramic heater(1) includes an electrostatic chuck electrode formed on one side of a substrate(2) and a heating electrode formed on the other side of the substrate. The substrate is composed of a carbon material or a carbon compound. The electrostatic chuck electrode is covered with a protective layer(7,8) including a dielectric layer. A thickness of the protective layer is equal to and more than 50 micrometers and equal to and more and is less than 200 micrometers. A difference between a maximum thickness and a minimum thickness of an electrostatic chuck electrode covering part of the protective layer is less than 30 micrometers.
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