Method for the determination of mass flow rate using the Coriolis force, apparatus for the determination of mass flow rate equipped with mass flow control module and mass flow rate control module using the Coriolis force

摘要

A Coriolis mass flow sensor comprises a flow sensor tube having first and second ends and first and second piezoelectric stacks positioned on the respective first and second ends of the flow sensor tube. The piezoelectric and reverse piezoelectric effects cause the flow sensor tube to vibrate and sense the twist in the flow sensor tube due to Coriolis force.