MANUFACTURING METHOD OF THIN FILM TRANSISTOR ARRAY PANEL

摘要

A method for manufacturing a TFT(Thin Film Transistor) display plate is provided to manufacture a TFT display plate stably having a new pixel electrode which doesn't contain indium. Gate electrodes are formed on a substrate. Source and drain electrodes, which are insulated from the gate electrodes, are formed. Pixel electrodes, connected to the drain electrodes, are formed. In forming the pixel electrodes, a transparent conductive oxidation film which doesn't contain indium is deposited. A photosensitive layer is formed on the transparent conductive oxidation film. Using the photosensitive layer as a mask, etching for the transparent conductive oxidation film is performed. Using a stripper, the photosensitive layer is removed.