| 摘要 |
A gap control unit of an apparatus for assembling substrates is provided to maintain specific gap between substrates by relatively compensating the amount of press. A gap control unit of an apparatus for assembling substrates includes a main member, a buffer member, a press control part, a first chamber(110) and a second chamber(120). A first substrate(S1) is placed on the first chamber and a second substrate(S2) is placed on the second chamber. The main member is located between the first chamber and the second chamber. The main member keeps the gap and gas tight of the apparatus for assembling substrate. The buffer member buffers the main member and compensates compressed value. The press control part is located between the main member and the buffer member. The press control part controls press of the buffer member. |
