METHOD AND APPARATUS FOR THE SPATIALLY RESOLVED DETERMINATION OF THE PHASE AND AMPLITUDE OF THE ELECTROMAGNETIC FIELD IN THE IMAGE PLANE OF AN IMAGE OF AN OBJECT

摘要

The invention relates to a method for the spatially resolved determination of the phase and amplitude of the electromagnetic field in the image plane of an image of an object. Here, images are produced by virtue of the fact that the object is illuminated using coherent light and is imaged into an image plane, light is detected in the image plane in a spatially resolved manner in pixels, wherein for each pixel the intensity of the light is determined, stored in image points and the image points are assigned to an image. First, a first then at least one further image are produced, wherein the phase and/or the amplitude of the light is modified in a predefined manner and the modification for each image differs from those for the other images. The phase in the image of the object in the image plane is determined in a spatially resolved manner from the images produced. The invention also relates to an apparatus for implementing the method. In such a method, the phase and/or the amplitude of the light is/are modified by a spatial frequency filtering in a pupil plane between object and image plane.