| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for reregistering an alignment object in which a photographed image 16A of a probe 12A after variation can be reregistered in a short time when the photographed image 16A is varied due to difference in model of the probe 12A. SOLUTION: The reregistration method comprises a step for making a first CCD camera 14 move automatically, based on the positional data of first image information at macro first point to macro fourth points, corresponding to four probes 12 registered previous time, for example, and photographing the image at the needle point of the probe 12A as the macro first point to the macro fourth points with low magnification by means of the camera 14; a step for reregistering the imaging conditions for the first image information and the image photographed at reregistration, as they are; a step for making the first CCD camera 14 move automatically, based on the position data of first image information and photographing the image of the probe 12A as the macro first point to the macro fourth points with high magnification by means of the camera 14; and a step for reregistering the imaging conditions of the second image information registered the previous time and the image photographed at the reregistration, as they are. COPYRIGHT: (C)2008,JPO&INPIT
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