| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a member for resin process which can effectively and surely prevent surface contamination caused by resin components such as oligomers from occurring by providing a surface layer without completely requiring a baking treatment at high temperature as in such a case that provides a coating layer of a fluororesin. <P>SOLUTION: The member for the resin process is characterized in that a diamond-like carbon layer 3 is formed on the surface of a metal-made substrate 1, and a fluorine-containing atomic layer 5 by a fluorine plasma treatment is formed on the diamond-like carbon layer 3, and a root-mean-square inclinationΔq of the surface of the fluorine-containing atomic layer 5 is larger than 6°, in particular, at least 7°. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
