| 摘要 |
PROBLEM TO BE SOLVED: To provide a mounting table structure which can enhance uniformity of the in-plane temperature of an article to be processed, and can enhance heating efficiency for the article to be processed by embedding a soaking member integrally in the mounting table. SOLUTION: The mounting table structure includes a table 32 for mounting an article to be processed in which a means 38 for heating the article W to be processed is embedded in order to perform specified heat treatment on the article in a processing container 4, and a column 30 for supporting the mounting table while standing from the bottom of the processing container. A soaking member 40 spreading in the plane direction is embedded in the mounting table above the embedded heating means. COPYRIGHT: (C)2008,JPO&INPIT |
