发明名称 Mgo Vapor Deposition Material
摘要 A MgO vapor deposition material, which is used to form a protective film of a plasma display panel, comprises pellets having MgO purity of 98% or more and relative density of 90% or more. The pellets contain only a Sc element as a rare earth element. The concentration of the Sc element is from 5 to 5,000 ppm, preferably from 10 to 3,000 ppm, and more preferably from 20 to 2,000 ppm.
申请公布号 US2007281185(A1) 申请公布日期 2007.12.06
申请号 US20050632346 申请日期 2005.07.13
申请人 MITSUBISHI MATERIALS CORPORATION;LG ELECTRONICS INC. 发明人 SAKURAI HIDEAKI;MAYUZUMI YOSHITAKA;HIRATA HIROKI
分类号 B32B9/00;C23C14/08;C23C14/24;H01J9/02;H01J11/22;H01J11/34;H01J11/40 主分类号 B32B9/00
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