| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing ammonium cryolite being a raw material for producing nitrogen trifluoride useful as a cleaning gas. SOLUTION: The method comprises reacting solid ammonium aluminum tetrafluoride with gaseous ammonia and gaseous hydrogen fluoride, reacting solid aluminum fluoride with gaseous ammonia and gaseous hydrogen fluoride, or reacting solid ammonium aluminum tetrafluoride and aluminum fluoride with gaseous ammonia and gaseous hydrogen fluoride. COPYRIGHT: (C)2008,JPO&INPIT
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