发明名称 Method for conforming a micro-electronic array to arbitrary shapes
摘要 Described is a method for conforming electronics to arbitrary shapes. The method comprises acts of forming a device structure to have a growth substrate, an etch stop layer affixed with the growth substrate, and a micro-electronic array. The micro-electronic array comprises a plurality of components atop the etch stop layer. The micro-electronic array is thereafter embedded into a shrinkable layer. The shrinkable layer is then mounted onto a handle wafer that includes a layer of adhering film with the shrinkable layer being pressed into the layer of adhering film. The growth substrate and the etch stop layer are thereafter removed. The adhering film is then dissolved to demount the micro-electronic array and shrinkable layer. Finally, the shrinkable layer is shrunk to conform the micro-electronic array to a three-dimensional shape, with the growth orientation flipped such that metal interconnects may be made to both the top and bottom of the chip.
申请公布号 US7292381(B1) 申请公布日期 2007.11.06
申请号 US20050223872 申请日期 2005.09.08
申请人 HRL LABORATORIES, LLC 发明人 PATTERSON PAMELA;HUNTER ANDY;SHUM ANGELA;BREWER PETER DAVID
分类号 G02F1/03;H01L23/34 主分类号 G02F1/03
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