发明名称 |
Alignment apparatus and method for aligning stacked devices |
摘要 |
An apparatus for passively aligning first and second substrates having micro-components disposed thereon when the substrates do not include patterned surfaces which face each other. The apparatus includes a first depression which cooperates with an alignment sphere to mechanically engage a corresponding depression disposed on the front surface of the first substrate and a second depression which cooperates with a second alignment sphere to mechanically engage a corresponding depression disposed on the front surface of the second substrate. The first and second depression of the alignment apparatus and the alignment spheres cooperate to passively align micro-components disposed on each of the substrates.
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申请公布号 |
US7290321(B2) |
申请公布日期 |
2007.11.06 |
申请号 |
US20060500061 |
申请日期 |
2006.08.07 |
申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
STEINBERG DAN A.;DAUTARTAS MINDAUGAS F.;RASNAKE JASEAN |
分类号 |
B23Q3/00;G02B6/36;G02B6/42 |
主分类号 |
B23Q3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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