发明名称 Methods of forming a diamond micro-channel structure and resulting devices
摘要 A diamond micro-channel structure disposed on a die, as well as methods of forming the same, are disclosed. One or more walls of each channel may comprise diamond (or other diamond-like material). The micro-channel structure may form part of a fluid cooling system for the die. Other embodiments are described and claimed.
申请公布号 US2007224727(A1) 申请公布日期 2007.09.27
申请号 US20060388078 申请日期 2006.03.23
申请人 DORY THOMAS S 发明人 DORY THOMAS S.
分类号 H01L21/00 主分类号 H01L21/00
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