发明名称 Method for fabricating a CMOS image sensor
摘要 A method for fabricating a complementary metal-oxide semiconductor (CMOS) image sensor is disclosed. An example method forms a metal pad in a pad area of a substrate having an active area and a pad area defined thereon, forms a protective layer on an entire surface of the substrate including the metal pad and selectively removing the protective layer to open the metal pad, and forms a barrier layer having a predetermined thickness on the entire surface of the substrate including the opened metal pad. Additionally, the exampled method forms red, green, and blue color filter layers on the barrier layer corresponding to the active area, forms a micro-lens over each of the color filter layers, and removes the barrier layer on the pad area.
申请公布号 US7268009(B2) 申请公布日期 2007.09.11
申请号 US20040025379 申请日期 2004.12.28
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 HWANG JOON
分类号 H01L21/00;H01L27/14;H01L27/146;H01L31/10;H04N5/335;H04N5/369;H04N5/374 主分类号 H01L21/00
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