| 摘要 |
A loadlock chamber is provided to make an internal construction of the chamber simple by machining a vent line on a wall of the chamber in a thickness direction of a cover, thereby lowering a manufacturing cost thereof. A loadlock chamber includes a body(10) having an opened upper portion, and a cover(30) engaged to the upper portion of the body. The body is provided with a gate(11) at a side wall thereof and a substrate loading portion(12) on an upper portion of a base plate. The cover has a vent hole(31) and a vent line for adjusting internal pressure of the body. The vent line is formed in a thickness direction of the cover, and is communicated with the vent hole penetrating a bottom surface of the cover.
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