| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a large mask and a mask blank for FPD suitable for multicolor exposure. <P>SOLUTION: The mask blank for the manufacture of an FPD device, having at least a semi-light transparent film for a gray tone mask having the function of regulating transmission amount provided on a light transparent substrate, is characterized in that the semi-light transparent film for the gray tone mask is a film regulated so that, in a wavelength range at least from (i) line to (g) line radiated from an ultrahigh pressure mercury lamp, the transmittance (that is, semitransmittance) range of the semi-light transparent film is within less than 5%. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
