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发明名称
Substrathalter für Vakuumbeschichtungsanlagen
摘要
申请公布号
DE10208319(B4)
申请公布日期
2007.08.02
申请号
DE20021008319
申请日期
2002.02.27
申请人
VON ARDENNE ANLAGENTECHNIK GMBH
发明人
HEINRICH, HANS-JUERGEN;HELLING, KARL-HEINZ;STUDENT, HANS-JOCHEN;WENZEL, BERND-DIETER
分类号
C23C14/50
主分类号
C23C14/50
代理机构
代理人
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地址
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