| 摘要 |
An ultraviolet curing apparatus of the bonded substrates are provided to prevent a mask base from breaking due to the thermal expansion caused by a rise in temperature. A light irradiating unit cures the sealant of a bonding substrate. A housing is located at the lower portion of the light irradiating member and includes the bonding substrate and a mask substrate(300). The housing also includes a boding substrate support for loading the boding substrate. A mask substrate support(310) sucks and supports the mask substrate by vacuum in order to control the curing position of the bonding substrate. A driving unit drives the bonding substrate support upwardly and downwardly. The mask substrate support includes a mask base(311) for sucking the mask substrate. A base support(312) supports both sides and the lower portion of the mask base. A guide bearing(313) guides the position according to the thermal expansion of the mask base. A single action cylinder assembly(314) is installed at the rear of the guide bearing, supplies the elastic force to the guide bearing and corrects the position of the guide bearing. |
