| 摘要 |
A metal cleaner for removing an oxide film and/or a nitride film adhered onto a metal without corroding the metal is provided. A metal cleaner comprises 0.1 to 5 wt.% of a fluorine-containing compound, 0.01 to 1 wt.% of a corrosion inhibitor, and the balance of water. The fluorine-containing compound is selected from the group consisting of hydrogen fluoride, hydrogen perfluoride, ammonium fluoride, tetramethyl ammonium fluoride, ammonium bifluoride, diethylenetriammonium trifluoride, and mixtures thereof. The corrosion inhibitor is selected from the group consisting of thioglycol, thioglycerol, thioglycolic acid, thiodiacetic acid, thioacetic acid, thiodiethanol, and mixtures thereof. The metal cleaner further comprises 1 to 10 wt.% of an oxidizer or 0.001 to 1 wt.% of a surfactant based on the total cleaner weight. The oxidizer is selected from the group consisting of hydrogen peroxide, ammonium peroxodisulfate, oxone, hypochlorous acid, ammonium persulfate, and mixtures thereof. The surfactant is a cationic surfactant, a nonionic surfactant, a fluorine-based surfactant, or mixtures thereof.
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