| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition giving a transparent cured resin pattern less liable to peel. <P>SOLUTION: The radiation-sensitive resin composition contains an alkali-soluble resin (A) having curability, a quinonediazido compound (B) and a solvent (C), wherein butyl lactate is contained as the solvent (C). <P>COPYRIGHT: (C)2007,JPO&INPIT |
