STAGE ASSEMBLY, PARTICLE-OPTICAL APPARATUS INCLUDING SUCH STAGE ASSEMBLY, AND METHOD OF TREATING SAMPLE IN SUCH APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a stage assembly that allows a sample to be more uniformly treated in a dual-beam particle optical apparatus. SOLUTION: The stage assembly includes a first source for generating a first irradiating beam E along a first axis A1; a second source for generating a second irradiating beam I along a second axis A2 that intersects the first axis at a beam intersection point; a sample table 21 on which a sample can be mounted; and a set of actuators arranged to effect translation of the sample table along directions substantially parallel to an X-axis that is perpendicular to a reference plane, a Y-axis parallel to the reference plane, and a Z-axis parallel to the reference plane. The set of actuators is further arranged to effect rotation of the sample table 21 about a rotation axis RA substantially parallel to the Z-axis and rotation of the sample table about a flip axis FA substantially perpendicular to the Z-axis. COPYRIGHT: (C)2007,JPO&INPIT